Fabrication Facility
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Atomic Layer Deposition
Thermal Evaporator
Wire Bonder -Ball
Electrical Test Station
Cylindrical Point Dryer
Spectroscopic Ellipsometer
Maskless Aligner
Sputter I
Wire Bonder Ball
Automatic Develop System
Electric Test Station
Stylus Profilometer
Stylus Profilometer
Stylus Profilometer
E-beam Evaporator
Stylus Profilometer
Stylus Profilometer
Parylene Coater
Stylus Profilometer
Parylene Coater
Polyimide
Wire Bonder – Wedge
Parylene Coater
Mask Aligner
Wire Bonder – Wedge
Wire Bonder – Wedge
Wire Bonder – Wedge
Wire Bonder – Wedge
Wire Bonder – Wedge
Reactive Ion Etcher
Automatic ‘Dry In/Dry Out’ Acid Etch System
Reactive Ion Etcher
Acid Hoods
Automatic ‘Dry In/Dry Out’ Acid Etch System
Reactive Ion Etcher